Inventor
DONOHOE KEVIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “DONOHOE KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
4 patentsUS5783100AJul 21, 1998
Method of high density plasma etching for semiconductor manufacture
MICRON TECHNOLOGY INC27 citations91
US5759922AJun 2, 1998
Control of etch profiles during extended overetch
MICRON TECHNOLOGY INC11 citations71
US6402886B2Jun 11, 2002
Use of a chemically active reticle carrier for photomask etching
MICRON TECHNOLOGY INC9 citations69
US6280646B1Aug 28, 2001
Use of a chemically active reticle carrier for photomask etching
MICRON TECHNOLOGY INC9 citations69