Inventor
FEUCHTINGER ERNST
DE4 patents
⚠️ This page may combine multiple inventors who share the name “FEUCHTINGER ERNST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WACKER SILTRONIC HALBLEITERMAT
3 patentsUS6458688B1Oct 1, 2002
Semiconductor wafer with improved flatness, and process for producing the semiconductor wafer
WACKER SILTRONIC HALBLEITERMAT27 citations90
US6051498AApr 18, 2000
Method for manufacturing a semiconductor wafer which is coated on one side and provided with a finish
WACKER SILTRONIC HALBLEITERMAT20 citations89
US5952242ASep 14, 1999
Method and device for removing a semiconductor wafer from a flat substrate
WACKER SILTRONIC HALBLEITERMAT11 citations71