Inventor

EMERY DAVID G

US4 patents

⚠️ This page may combine multiple inventors who share the name “EMERY DAVID G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US6282309B1Aug 28, 2001

Enhanced sensitivity automated photomask inspection system

KLA TENCOR CORP164 citations96

US7664310B2Feb 16, 2010

Advanced phase shift inspection method

KLA TENCOR CORP14 citations81

KLA INSTR CORP

1 patent

US5563702AOct 8, 1996

Automated photomask inspection apparatus and method

KLA INSTR CORP386 citations98

KLA TENCOR TECH CORP

1 patent

US6836560B2Dec 28, 2004

Advanced phase shift inspection method

KLA TENCOR TECH CORP87 citations95