Inventor
OWCZARZ ALEK
US3 patents
Patents
3 patentsUS6607425B1Aug 19, 2003
Pressurized membrane platen design for improving performance in CMP applications
LAM RES CORP31 citations90
US6913521B2Jul 5, 2005
Methods using active retainer rings for improving edge performance in CMP applications
LAM RES CORP5 citations71
US6776695B2Aug 17, 2004
Platen design for improving edge performance in CMP applications
LAM RES CORP11 citations71