Inventor
HELMS JR AUBREY L
US3 patents
⚠️ This page may combine multiple inventors who share the name “HELMS JR AUBREY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AT & T BELL LAB
2 patentsUS5066615ANov 19, 1991
Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers
AT & T BELL LAB90 citations94
US5106786AApr 21, 1992
Thin coatings for use in semiconductor integrated circuits and processes as antireflection coatings consisting of tungsten silicide
AT & T BELL LAB38 citations91