Inventor
HARUMOTO MASAHIKO
JP37 patents
⚠️ This page may combine multiple inventors who share the name “HARUMOTO MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
23 patentsUS11004702B2May 11, 2021
Film processing unit and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations73
US10591820B2Mar 17, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations73
US11107698B2Aug 31, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD2 citations71
US12508623B2Dec 30, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US12119242B2Oct 15, 2024
Film processing method
SCREEN HOLDINGS CO LTD0 citations62
US11986853B2May 21, 2024
Substrate processing apparatus, film formation unit, substrate processing method and film formation method
SCREEN HOLDINGS CO LTD1 citations62
US11243469B2Feb 8, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10854480B2Dec 1, 2020
Film processing unit, substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10832925B2Nov 10, 2020
Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10941492B2Mar 9, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD0 citations60
US10840096B2Nov 17, 2020
Method for processing substrate
SCREEN HOLDINGS CO LTD0 citations52
US10684548B2Jun 16, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations52
US10395942B2Aug 27, 2019
Etching device, substrate processing apparatus, etching method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US10185219B2Jan 22, 2019
Developing method
SCREEN HOLDINGS CO LTD0 citations52
US10955745B2Mar 23, 2021
Exposure device, substrate processing apparatus, exposure method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10900126B2Jan 26, 2021
Substrate treating method and apparatus used therefor
SCREEN HOLDINGS CO LTD0 citations50
US11281108B2Mar 22, 2022
Exposure device
SCREEN HOLDINGS CO LTD0 citations44
US10569297B2Feb 25, 2020
Coating method
SCREEN HOLDINGS CO LTD0 citations42
US10754251B2Aug 25, 2020
Development unit, substrate processing apparatus, development method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10331034B2Jun 25, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10444636B2Oct 15, 2019
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10401736B2Sep 3, 2019
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10539877B2Jan 21, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations37
DAINIPPON SCREEN MFG
6 patentsUS6869234B2Mar 22, 2005
Developing apparatus and developing method
DAINIPPON SCREEN MFG23 citations92
US6692165B2Feb 17, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG47 citations91
US6656277B2Dec 2, 2003
Apparatus for and method of processing substrate
DAINIPPON SCREEN MFG18 citations84
US6752544B2Jun 22, 2004
Developing apparatus and developing method
DAINIPPON SCREEN MFG12 citations74
US6749351B2Jun 15, 2004
Apparatus for developing substrate
DAINIPPON SCREEN MFG11 citations73
US7597491B2Oct 6, 2009
Apparatus for and method of processing substrate
DAINIPPON SCREEN MFG0 citations52
HARUMOTO MASAHIKO
4 patentsUS9375748B2Jun 28, 2016
Substrate processing apparatus and substrate processing method
HARUMOTO MASAHIKO59 citations96
US8781308B2Jul 15, 2014
Apparatus for and method of heat-treating film formed on surface of substrate
HARUMOTO MASAHIKO6 citations72
US8956695B2Feb 17, 2015
Developing method
HARUMOTO MASAHIKO2 citations61
US8137576B2Mar 20, 2012
Substrate developing method and developing apparatus
HARUMOTO MASAHIKO2 citations61
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
3 patentsUS10047441B2Aug 14, 2018
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations62
US9828676B2Nov 28, 2017
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51
US9581907B2Feb 28, 2017
Developing apparatus
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51