Inventor
ASAI MASAYA
JP20 patents
⚠️ This page may combine multiple inventors who share the name “ASAI MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
19 patentsUS11004702B2May 11, 2021
Film processing unit and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations73
US10591820B2Mar 17, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations73
US11107698B2Aug 31, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD2 citations71
US12508623B2Dec 30, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US12119242B2Oct 15, 2024
Film processing method
SCREEN HOLDINGS CO LTD0 citations62
US11986853B2May 21, 2024
Substrate processing apparatus, film formation unit, substrate processing method and film formation method
SCREEN HOLDINGS CO LTD1 citations62
US11243469B2Feb 8, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10854480B2Dec 1, 2020
Film processing unit, substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10832925B2Nov 10, 2020
Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10941492B2Mar 9, 2021
Substrate treating method
SCREEN HOLDINGS CO LTD0 citations60
US10395942B2Aug 27, 2019
Etching device, substrate processing apparatus, etching method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US10955745B2Mar 23, 2021
Exposure device, substrate processing apparatus, exposure method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10900126B2Jan 26, 2021
Substrate treating method and apparatus used therefor
SCREEN HOLDINGS CO LTD0 citations50
US11281108B2Mar 22, 2022
Exposure device
SCREEN HOLDINGS CO LTD0 citations44
US10754251B2Aug 25, 2020
Development unit, substrate processing apparatus, development method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10331034B2Jun 25, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10444636B2Oct 15, 2019
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10401736B2Sep 3, 2019
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10539877B2Jan 21, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations37