Inventor
COLSON MICHAEL BRUCE
US3 patents
Patents
3 patentsUS6664737B1Dec 16, 2003
Dielectric barrier discharge apparatus and process for treating a substrate
AXCELIS TECH INC51 citations90
US6796711B2Sep 28, 2004
Contact temperature probe and process
AXCELIS TECH INC15 citations80
US7338575B2Mar 4, 2008
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
AXCELIS TECH INC10 citations76