Inventor

HAVERKORT RUBEN

NL3 patents

⚠️ This page may combine multiple inventors who share the name “HAVERKORT RUBEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT

1 patent

US7294582B2Nov 13, 2007

Low temperature silicon compound deposition

ASM INT116 citations95

ASM INC

1 patent

US7629270B2Dec 8, 2009

Remote plasma activated nitridation

ASM INC11 citations80

ASML NETHERLANDS BV

1 patent

US12363818B2Jul 15, 2025

EUV radiation system including maximizing droplet velocity change transverse to main pulse propagation

ASML NETHERLANDS BV0 citations41