P

Inventor

WAN YUET MEI

AU4 patents
⚠️ This page may combine multiple inventors who share the name “WAN YUET MEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT

3 patents
US7092287B2Aug 15, 2006

Method of fabricating silicon nitride nanodots

ASM INT540 citations96
US7629267B2Dec 8, 2009

High stress nitride film and method for formation thereof

ASM INT83 citations95
US7294582B2Nov 13, 2007

Low temperature silicon compound deposition

ASM INT116 citations95

ASM INC

1 patent
US7629270B2Dec 8, 2009

Remote plasma activated nitridation

ASM INC11 citations80