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Inventor
KIRST ULRICH
DE
2 patents
Patents
2 patents
US7637126B2
Dec 29, 2009
Method for the production of laser-active quartz glass and use thereof
HERAEUS QUARZGLAS
13 citations
82
US7749930B2
Jul 6, 2010
Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
HERAEUS QUARZGLAS
7 citations
69