Inventor
DEBIESME FRANCOIS XAVIER
NL5 patents
⚠️ This page may combine multiple inventors who share the name “DEBIESME FRANCOIS XAVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BUTLER HANS
4 patentsUS9715171B2Jul 25, 2017
Imprint lithographic apparatus and imprint lithographic method
BUTLER HANS4 citations71
US9378722B2Jun 28, 2016
Lithographic apparatus with actuator to compensate acoustic vibration
BUTLER HANS6 citations70
US8553199B2Oct 8, 2013
Lithographic apparatus and device manufacturing method
BUTLER HANS6 citations70
US8243258B2Aug 14, 2012
Lithographic apparatus having acoustic resonator
BUTLER HANS5 citations60