Inventor
BOYD JR WENDELL
US10 patents
⚠️ This page may combine multiple inventors who share the name “BOYD JR WENDELL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS10403534B2Sep 3, 2019
Pixilated cooling, temperature controlled substrate support assembly
APPLIED MATERIALS INC3 citations72
US9698041B2Jul 4, 2017
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
APPLIED MATERIALS INC2 citations72
US9558981B2Jan 31, 2017
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC4 citations72
US10736182B2Aug 4, 2020
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers
APPLIED MATERIALS INC1 citations62
US10121688B2Nov 6, 2018
Electrostatic chuck with external flow adjustments for improved temperature distribution
APPLIED MATERIALS INC1 citations51
US9986598B2May 29, 2018
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
APPLIED MATERIALS INC0 citations51
US9875923B2Jan 23, 2018
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC0 citations51