Inventor
KELLOGG MICHAEL
US8 patents
⚠️ This page may combine multiple inventors who share the name “KELLOGG MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS9502275B1Nov 22, 2016
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs
LAM RES CORP13 citations82
US11393705B2Jul 19, 2022
Wafer transport assembly with integrated buffers
LAM RES CORP2 citations71
US10790174B2Sep 29, 2020
Wafer transport assembly with integrated buffers
LAM RES CORP1 citations71
US11227749B2Jan 18, 2022
3D printed plasma arrestor for an electrostatic chuck
LAM RES CORP1 citations60
US10014196B2Jul 3, 2018
Wafer transport assembly with integrated buffers
LAM RES CORP0 citations50
US9929028B2Mar 27, 2018
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs
LAM RES CORP1 citations50