Inventor
Blachut Gregory
US6 patents
⚠️ This page may combine multiple inventors who share the name “Blachut Gregory”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS11862473B2Jan 2, 2024
Controlled degradation of a stimuli-responsive polymer film
LAM RES CORP2 citations69
US12372872B2Jul 29, 2025
Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
LAM RES CORP0 citations59
US12322588B2Jun 3, 2025
Stimulus responsive polymer films and formulations
LAM RES CORP0 citations58
US11065654B2Jul 20, 2021
In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates
LAM RES CORP0 citations58