Inventor
SHINKAI KENJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SHINKAI KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
8 patentsUS10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US11472002B2Oct 18, 2022
Substrate polishing apparatus
EBARA CORP0 citations62
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US10576604B2Mar 3, 2020
Substrate polishing apparatus
EBARA CORP0 citations51
US9724798B2Aug 8, 2017
Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus
EBARA CORP0 citations51
US12358098B2Jul 15, 2025
Liquid feeder and polishing apparatus
EBARA CORP0 citations47
US11541502B2Jan 3, 2023
Substrate processing apparatus
EBARA CORP0 citations46
US9666469B2May 30, 2017
Lifting device, substrate processing apparatus having lifting device, and unit transferring method
EBARA CORP0 citations41