Inventor
AUSTIN DUSTIN ZACHARY
US8 patents
⚠️ This page may combine multiple inventors who share the name “AUSTIN DUSTIN ZACHARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10840082B2Nov 17, 2020
Method to clean SnO2 film from chamber
LAM RES CORP3 citations71
US11915923B2Feb 27, 2024
Method to clean SnO2 film from chamber
LAM RES CORP0 citations61
US11031244B2Jun 8, 2021
Modification of SNO2 surface for EUV lithography
LAM RES CORP0 citations61
US12372872B2Jul 29, 2025
Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
LAM RES CORP0 citations59
US12473633B2Nov 18, 2025
Plasma enhanced atomic layer deposition of silicon-containing films
LAM RES CORP0 citations58
US12417943B2Sep 16, 2025
Reducing intralevel capacitance in semiconductor devices
LAM RES CORP0 citations58
US11717866B2Aug 8, 2023
Etching metal-oxide and protecting chamber components
LAM RES CORP0 citations52