Inventor
YABUTA TAKASHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “YABUTA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6513537B1Feb 4, 2003
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD20 citations92
US7927429B2Apr 19, 2011
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium
TOKYO ELECTRON LTD7 citations83
US10236192B2Mar 19, 2019
Liquid processing apparatus, liquid processing method, and storage medium
TOKYO ELECTRON LTD5 citations68
US9192878B2Nov 24, 2015
Liquid processing apparatus
TOKYO ELECTRON LTD5 citations68
US12170209B2Dec 17, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations49
US10748790B2Aug 18, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations41
US9862007B2Jan 9, 2018
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations38