Inventor
FELLER ALLEN D
US3 patents
Patents
3 patentsUS5407526AApr 18, 1995
Chemical mechanical polishing slurry delivery and mixing system
INTEL CORP171 citations95
US6358853B2Mar 19, 2002
Ceria based slurry for chemical-mechanical polishing
INTEL CORP19 citations88
US7182882B2Feb 27, 2007
Method of improving chemical mechanical polish endpoint signals by use of chemical additives
INTEL CORP0 citations49