Inventor
DOLECHEK KERT L
US11 patents
Patents
11 patentsUS6447232B1Sep 10, 2002
Semiconductor wafer processing apparatus having improved wafer input/output handling system
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US6273110B1Aug 14, 2001
Automated semiconductor processing system
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US7354649B2Apr 8, 2008
Semiconductor workpiece
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US7288489B2Oct 30, 2007
Process for thinning a semiconductor workpiece
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US7625821B2Dec 1, 2009
Process and apparatus for thinning a semiconductor workpiece
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US7193295B2Mar 20, 2007
Process and apparatus for thinning a semiconductor workpiece
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US6799932B2Oct 5, 2004
Semiconductor wafer processing apparatus
SEMITOOL INC11 citations73
US6652219B2Nov 25, 2003
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC12 citations73
US6736148B2May 18, 2004
Automated semiconductor processing system
SEMITOOL INC12 citations71
US7898089B2Mar 1, 2011
Semiconductor workpiece
SEMITOOL INC3 citations62
US6599075B2Jul 29, 2003
Semiconductor wafer processing apparatus
SEMITOOL INC6 citations62