Inventor

HEIMEL OLIVER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “HEIMEL OLIVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US10837111B2Nov 17, 2020

Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier

APPLIED MATERIALS INC3 citations70

US11718904B2Aug 8, 2023

Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber

APPLIED MATERIALS INC0 citations49

KLUG THOMAS

1 patent

US8083912B2Dec 27, 2011

Substrate carrier

KLUG THOMAS3 citations54

HEIMEL OLIVER

1 patent

US8282089B2Oct 9, 2012

Vacuum transport device with movable guide rail

HEIMEL OLIVER5 citations53