Inventor

IORI KAZUYUKI

JP2 patents

Patents

2 patents

US8231767B2Jul 31, 2012

Magnetic field generating apparatus and plasma processing apparatus

IORI KAZUYUKI10 citations79

US8475672B2Jul 2, 2013

Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed

IORI KAZUYUKI10 citations78