P

Inventor

ABE SHO

JP11 patents
⚠️ This page may combine multiple inventors who share the name “ABE SHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO OHKA KOGYO CO LTD

4 patents
US8039199B2Oct 18, 2011

Negative resist composition for immersion exposure and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD8 citations81
US8034536B2Oct 11, 2011

Resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD4 citations61
US7598017B2Oct 6, 2009

Negative resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD2 citations61
US8021824B2Sep 20, 2011

Polymer compound, resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD1 citations51

ANDO TOMOYUKI

1 patent
US8236483B2Aug 7, 2012

Method of forming resist pattern

ANDO TOMOYUKI7 citations81

HIRANO TOMOYUKI

1 patent
US8632960B2Jan 21, 2014

Method of forming resist pattern and negative tone-development resist composition

HIRANO TOMOYUKI2 citations62

KAWAUE AKIYA

1 patent
US8541157B2Sep 24, 2013

Resist composition, method of forming resist pattern, compound and acid generator including the same

KAWAUE AKIYA0 citations51

ABE SHO

1 patent
US8404426B2Mar 26, 2013

Negative resist composition, method of forming resist pattern and polymeric compound

ABE SHO1 citations45

HORIBA LTD

1 patent
US9841350B2Dec 12, 2017

Vehicle drive system testing apparatus

HORIBA LTD0 citations40

SHIMIZU HIROAKI

1 patent
US9005872B2Apr 14, 2015

Resist composition and method of forming resist pattern

SHIMIZU HIROAKI0 citations40

TANAKA KEN

1 patent
US8859187B2Oct 14, 2014

Method of forming resist pattern and negative resist composition

TANAKA KEN0 citations40