Inventor

SUGAHARA SHINJI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SUGAHARA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKAMOTO NAOKO

1 patent

US8969172B2Mar 3, 2015

Method for forming isolation structure

NAKAMOTO NAOKO7 citations71

TOKYO ELECTRON LTD

1 patent

US11043399B2Jun 22, 2021

Substrate processing apparatus and operation method of substrate processing apparatus

TOKYO ELECTRON LTD0 citations45