Inventor

KATOU TAIKI

JP3 patents

Patents

3 patents

US9926624B2Mar 27, 2018

Film forming method and film forming apparatus

TOKYO ELECTRON LTD5 citations70

US9390933B2Jul 12, 2016

Etching method, storage medium and etching apparatus

TOKYO ELECTRON LTD3 citations69

US11041239B2Jun 22, 2021

Film forming method for SiC film

TOKYO ELECTRON LTD0 citations59