Inventor
QIU GUANXUN
CN5 patents
Patents
5 patentsUS10349187B2Jul 9, 2019
Acoustic sensor integrated MEMS microphone structure and fabrication method thereof
GOERTEK INC2 citations68
US9866971B2Jan 9, 2018
Method for manufacturing thermal bimorph diaphragm and MEMS speaker with thermal bimorphs
GOERTEK INC0 citations49
US11363384B2Jun 14, 2022
Sensitive diaphragm with rim structure and sensor
GOERTEK INC0 citations47
US10277968B2Apr 30, 2019
Microphone with dustproof through holes
GOERTEK INC0 citations47
US10233075B2Mar 19, 2019
Method for forming filter net on MEMS sensor and MEMS sensor
GOERTEK INC0 citations47