Inventor
RAINVILLE MELIHA GOZDE
US10 patents
Patents
10 patentsUS10665501B2May 26, 2020
Deposition of Aluminum oxide etch stop layers
LAM RES CORP22 citations93
US9859153B1Jan 2, 2018
Deposition of aluminum oxide etch stop layers
LAM RES CORP19 citations93
US10559461B2Feb 11, 2020
Selective deposition with atomic layer etch reset
LAM RES CORP10 citations83
US10998187B2May 4, 2021
Selective deposition with atomic layer etch reset
LAM RES CORP2 citations72
US10418236B2Sep 17, 2019
Composite dielectric interface layers for interconnect structures
LAM RES CORP3 citations72
US10049869B2Aug 14, 2018
Composite dielectric interface layers for interconnect structures
LAM RES CORP4 citations72
US10472716B1Nov 12, 2019
Showerhead with air-gapped plenums and overhead isolation gas distributor
LAM RES CORP4 citations69
US10804144B2Oct 13, 2020
Deposition of aluminum oxide etch stop layers
LAM RES CORP0 citations51
US10745806B2Aug 18, 2020
Showerhead with air-gapped plenums and overhead isolation gas distributor
LAM RES CORP0 citations48
US10651080B2May 12, 2020
Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
LAM RES CORP0 citations39