Inventor
CHOU TUNG-HE
TW10 patents
Patents
10 patentsUS11081334B2Aug 3, 2021
Particle prevention in wafer edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10857651B2Dec 8, 2020
Apparatus of chemical mechanical polishing and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11605534B2Mar 14, 2023
Particle prevention in wafer edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12204232B2Jan 21, 2025
Semiconductor device having a gate electrode with a top peripheral portion and a top central portion, and the top peripheral portion is a protrusion or a depression surrounding the top central portion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12183571B2Dec 31, 2024
Integrated aligned stealth laser for wafer edge trimming process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11901171B2Feb 13, 2024
Integrated aligned stealth laser with blade and grinding apparatus for wafer edge trimming process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11846871B2Dec 19, 2023
Device with a recessed gate electrode that has high thickness uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11445104B2Sep 13, 2022
Device with a recessed gate electrode that has high thickness uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10879077B2Dec 29, 2020
Planarization apparatus and planarization method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11351648B2Jun 7, 2022
Chemical mechanical polishing apparatus, slurry, and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50