Inventor
WU MING-TUNG
TW20 patents
⚠️ This page may combine multiple inventors who share the name “WU MING-TUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS9355882B2May 31, 2016
Transfer module for bowed wafers
TAIWAN SEMICONDUCTOR MFG CO LTD391 citations99
US11081334B2Aug 3, 2021
Particle prevention in wafer edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10510563B2Dec 17, 2019
Wafer carrier assembly
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10857651B2Dec 8, 2020
Apparatus of chemical mechanical polishing and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11605534B2Mar 14, 2023
Particle prevention in wafer edge trimming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11342199B2May 24, 2022
Wafer carrier assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12183571B2Dec 31, 2024
Integrated aligned stealth laser for wafer edge trimming process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11901171B2Feb 13, 2024
Integrated aligned stealth laser with blade and grinding apparatus for wafer edge trimming process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10879077B2Dec 29, 2020
Planarization apparatus and planarization method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10119909B2Nov 6, 2018
Biological sensing structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9472504B2Oct 18, 2016
Semiconductor having a high aspect ratio via
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52