Inventor · disambiguated record
Klaus Drews
Also filed as: DREWS KLAUS
3 granted patents·116 citations·filing 1975–1987
75Inventor score
Technology areasH10P
Files withPHILIPS CORP3
Top patents by PatentIndex Score
3 records- 0191US3993909ASubstrate holder for etching thin filmsPHILIPS CORP·Filed 1975·Granted Nov 23, 1976·82 cites·3 claims
- 0253US4673588ADevice for coating a substrate by means of plasma-CVD or cathode sputteringPHILIPS CORP·Filed 1985·Granted Jun 16, 1987·20 cites·3 claims
- 0342US4715319ADevice for coating a substrate by means of plasma-CVD or cathode sputteringPHILIPS CORP·Filed 1987·Granted Dec 29, 1987·14 cites·24 claims
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