Inventor
BLANK RICHARD M
US23 patents
⚠️ This page may combine multiple inventors who share the name “BLANK RICHARD M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
17 patentsUS10109517B1Oct 23, 2018
Rotational indexer with additional rotational axes
LAM RES CORP58 citations98
US10155309B1Dec 18, 2018
Wafer handling robots with rotational joint encoders
LAM RES CORP26 citations94
US9299598B2Mar 29, 2016
Robot with integrated aligner
LAM RES CORP17 citations84
US10483142B1Nov 19, 2019
Vacuum robot positioning system with reduced sensitivity to chamber pressure
LAM RES CORP10 citations81
US11482436B2Oct 25, 2022
Rotational indexer with additional rotational axes
LAM RES CORP1 citations72
US10515834B2Dec 24, 2019
Multi-station tool with wafer transfer microclimate systems
LAM RES CORP4 citations71
US11512393B2Nov 29, 2022
Dynamic sheath control with edge ring lift
LAM RES CORP3 citations69
US10796940B2Oct 6, 2020
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP5 citations69
US9349629B2May 24, 2016
Touch auto-calibration of process modules
LAM RES CORP3 citations69
US11581214B2Feb 14, 2023
Enhanced automatic wafer centering system and techniques for same
LAM RES CORP2 citations65
US10509052B2Dec 17, 2019
Smart vibration wafer with optional integration with semiconductor processing tool
LAM RES CORP2 citations64
US11699610B2Jul 11, 2023
Rotational indexer with additional rotational axes
LAM RES CORP0 citations62
US12480208B2Nov 25, 2025
Dynamic sheath control with edge ring lift
LAM RES CORP0 citations59
US12485554B2Dec 2, 2025
Wafer handling robot with gravitational field sensor
LAM RES CORP0 citations58
US11833662B2Dec 5, 2023
Wafer handling robot with radial gas curtain and/or interior volume control
LAM RES CORP0 citations52
US12272583B2Apr 8, 2025
Reduced footprint wafer handling platform
LAM RES CORP0 citations47
US12341040B2Jun 24, 2025
Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
LAM RES CORP0 citations46
NOVELLUS SYSTEMS INC
4 patentsUS9472432B1Oct 18, 2016
Dedicated hot and cold end effectors for improved throughput
NOVELLUS SYSTEMS INC337 citations98
US6682295B2Jan 27, 2004
Flatted object passive aligner
NOVELLUS SYSTEMS INC16 citations84
US8985935B2Mar 24, 2015
Mass damper for semiconductor wafer handling end effector
NOVELLUS SYSTEMS INC11 citations78
US9245783B2Jan 26, 2016
Vacuum robot with linear translation carriage
NOVELLUS SYSTEMS INC3 citations73