Inventor
MICHEL WILLY
CH6 patents
⚠️ This page may combine multiple inventors who share the name “MICHEL WILLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SOITEC SILICON ON INSULATOR
3 patentsUS7645682B2Jan 12, 2010
Bonding interface quality by cold cleaning and hot bonding
SOITEC SILICON ON INSULATOR8 citations83
US8349703B2Jan 8, 2013
Method of bonding two substrates
SOITEC SILICON ON INSULATOR2 citations62
US7892861B2Feb 22, 2011
Method for fabricating a compound-material wafer
SOITEC SILICON ON INSULATOR2 citations62