P

Inventor

SETO ISAMU

JP10 patents
⚠️ This page may combine multiple inventors who share the name “SETO ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

7 patents
US6242751B1Jun 5, 2001

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD33 citations92
US5969365AOct 19, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD20 citations92
US5757015AMay 26, 1998

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD25 citations92
US5719402AFeb 17, 1998

Method of and system for charged particle beam exposure

FUJITSU LTD32 citations92
US5546319AAug 13, 1996

Method of and system for charged particle beam exposure

FUJITSU LTD21 citations92
US5965895AOct 12, 1999

Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure

FUJITSU LTD13 citations82
US5721432AFeb 24, 1998

Method of and system for charged particle beam exposure

FUJITSU LTD16 citations82

ADVANTEST CORP

2 patents
US6399954B1Jun 4, 2002

Charged-particle beam lithography apparatus and system capable of readily detecting abnormality in controlling on-off operation

ADVANTEST CORP21 citations92
US6407397B1Jun 18, 2002

Charged particle beam exposure apparatus

ADVANTEST CORP12 citations72

SETO ISAMU

1 patent
US8624205B2Jan 7, 2014

Charged particle beam writing apparatus and device production method

SETO ISAMU1 citations39