Inventor
LEE KUN-I
TW4 patents
⚠️ This page may combine multiple inventors who share the name “LEE KUN-I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6436851B1Aug 20, 2002
Method for spin coating a high viscosity liquid on a wafer
TAIWAN SEMICONDUCTOR MFG39 citations89
US6531374B2Mar 11, 2003
Overlay shift correction for the deposition of epitaxial silicon layer and post-epitaxial silicon layers in a semiconductor device
TAIWAN SEMICONDUCTOR MFG8 citations70
US6652912B2Nov 25, 2003
Method and system for spraying a viscous material on a wafer
TAIWAN SEMICONDUCTOR MFG0 citations49