Inventor

LEU REN-JYH

TW4 patents

⚠️ This page may combine multiple inventors who share the name “LEU REN-JYH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

3 patents

US6252670B1Jun 26, 2001

Method for accurately calibrating a constant-angle reflection-interference spectrometer (CARIS) for measuring photoresist thickness

TAIWAN SEMICONDUCTOR MFG18 citations79

US6531374B2Mar 11, 2003

Overlay shift correction for the deposition of epitaxial silicon layer and post-epitaxial silicon layers in a semiconductor device

TAIWAN SEMICONDUCTOR MFG8 citations70

US6652912B2Nov 25, 2003

Method and system for spraying a viscous material on a wafer

TAIWAN SEMICONDUCTOR MFG0 citations49

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9814097B2Nov 7, 2017

Baking apparatus for priming substrate

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49