Inventor

YAGI FUMIKO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YAGI FUMIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7896967B2Mar 1, 2011

Gas supply system, substrate processing apparatus and gas supply method

TOKYO ELECTRON LTD22 citations90

US7535688B2May 19, 2009

Method for electrically discharging substrate, substrate processing apparatus and program

TOKYO ELECTRON LTD49 citations90

HAYASAKA SHINICHIRO

1 patent

US8790529B2Jul 29, 2014

Gas supply system, substrate processing apparatus and gas supply method

HAYASAKA SHINICHIRO11 citations77

YOKOUCHI TAKESHI

1 patent

US8190281B2May 29, 2012

Substrate processing apparatus, method for examining substrate processing conditions, and storage medium

YOKOUCHI TAKESHI9 citations76