Inventor

FELLIS AARON

US2 patents

⚠️ This page may combine multiple inventors who share the name “FELLIS AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US9362163B2Jun 7, 2016

Methods and apparatuses for atomic layer cleaning of contacts and vias

LAM RES CORP109 citations96

DANEK MICHAL

1 patent

US8709948B2Apr 29, 2014

Tungsten barrier and seed for copper filled TSV

DANEK MICHAL36 citations92