Inventor
SON WOONG-KYU
KR3 patents
Patents
3 patentsUS9322771B2Apr 26, 2016
Apparatus and method for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD4 citations68
US9165354B2Oct 20, 2015
Method of analyzing photolithography processes
SAMSUNG ELECTRONICS CO LTD0 citations48
US9551653B2Jan 24, 2017
Methods for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD0 citations47