Inventor

BYUN JUNG-HOON

KR3 patents

Patents

3 patents

US9322771B2Apr 26, 2016

Apparatus and method for monitoring semiconductor fabrication processes using polarized light

SAMSUNG ELECTRONICS CO LTD4 citations68

US9551653B2Jan 24, 2017

Methods for monitoring semiconductor fabrication processes using polarized light

SAMSUNG ELECTRONICS CO LTD0 citations47

US12540851B2Feb 3, 2026

Semiconductor device measuring device and method for measuring semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations40