Inventor
LEEM CHOON-SHIK
KR4 patents
Patents
4 patentsUS9322771B2Apr 26, 2016
Apparatus and method for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD4 citations68
US10281412B2May 7, 2019
Apparatus for measuring semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations49
US9551653B2Jan 24, 2017
Methods for monitoring semiconductor fabrication processes using polarized light
SAMSUNG ELECTRONICS CO LTD0 citations47
US9939388B2Apr 10, 2018
Apparatus for inspecting wafer
SAMSUNG ELECTRONICS CO LTD0 citations39