Inventor

CHIN SOO-BOK

KR4 patents

Patents

4 patents

US9322771B2Apr 26, 2016

Apparatus and method for monitoring semiconductor fabrication processes using polarized light

SAMSUNG ELECTRONICS CO LTD4 citations68

US9165354B2Oct 20, 2015

Method of analyzing photolithography processes

SAMSUNG ELECTRONICS CO LTD0 citations48

US9551653B2Jan 24, 2017

Methods for monitoring semiconductor fabrication processes using polarized light

SAMSUNG ELECTRONICS CO LTD0 citations47

US8890069B2Nov 18, 2014

Method for detecting defect of substrate

SAMSUNG ELECTRONICS CO LTD1 citations42