Inventor
OMORI MAO
JP19 patents
Patents
19 patentsUS11476167B2Oct 18, 2022
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD4 citations71
US11081409B2Aug 3, 2021
Heat treatment apparatus of light irradiation type and heat treatment method
SCREEN HOLDINGS CO LTD4 citations71
US11024521B2Jun 1, 2021
Heat treatment method for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations62
US11024524B2Jun 1, 2021
Heat treatment method and heat treatment apparatus for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations62
US12057352B2Aug 6, 2024
Heat treatment method and heat treatment apparatus of light irradiation type
SCREEN HOLDINGS CO LTD0 citations61
US11764073B2Sep 19, 2023
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations61
US10930521B2Feb 23, 2021
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations61
US11516884B2Nov 29, 2022
Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto
SCREEN HOLDINGS CO LTD0 citations60
US12125723B2Oct 22, 2024
Heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations53
US12598940B2Apr 7, 2026
Method for measuring temperature
SCREEN HOLDINGS CO LTD0 citations51
US12051596B2Jul 30, 2024
Heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations51
US12020958B2Jun 25, 2024
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations51
US11908703B2Feb 20, 2024
Light irradiation type heat treatment method
SCREEN HOLDINGS CO LTD0 citations51
US11746410B2Sep 5, 2023
Heat treatment apparatus heating substrate
SCREEN HOLDINGS CO LTD0 citations51
US11289344B2Mar 29, 2022
Heat treatment method and heat treatment apparatus for managing dummy wafer
SCREEN HOLDINGS CO LTD0 citations51
US11551946B2Jan 10, 2023
Light irradiation type heat treatment method and heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations49
US10679874B2Jun 9, 2020
Light irradiation type heat treatment apparatus and heat treatment method
SCREEN HOLDINGS CO LTD0 citations47
US11621178B2Apr 4, 2023
Light irradiation type heat treatment apparatus including oxygen analyzer and heat treatment method thereof
SCREEN HOLDINGS CO LTD0 citations45
US10446415B2Oct 15, 2019
Exhaust method of heat treatment apparatus
SCREEN HOLDINGS CO LTD0 citations41