Inventor
STEEN MICHELLE L
US16 patents
⚠️ This page may combine multiple inventors who share the name “STEEN MICHELLE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
14 patentsUS7696036B2Apr 13, 2010
CMOS transistors with differential oxygen content high-k dielectrics
IBM33 citations92
US7569466B2Aug 4, 2009
Dual metal gate self-aligned integration
IBM19 citations92
US7271455B2Sep 18, 2007
Formation of fully silicided metal gate using dual self-aligned silicide process
IBM20 citations92
US8383483B2Feb 26, 2013
High performance CMOS circuits, and methods for fabricating same
IBM10 citations84
US8035173B2Oct 11, 2011
CMOS transistors with differential oxygen content high-K dielectrics
IBM14 citations84
US7872317B2Jan 18, 2011
Dual metal gate self-aligned integration
IBM10 citations84
US6815813B1Nov 9, 2004
Self-contained heat sink and a method for fabricating same
IBM10 citations74
US7273777B2Sep 25, 2007
Formation of fully silicided (FUSI) gate using a dual silicide process
IBM9 citations73
US7014959B2Mar 21, 2006
CD uniformity of chrome etch to photomask process
IBM8 citations71
US7833849B2Nov 16, 2010
Method of fabricating a semiconductor structure including one device region having a metal gate electrode located atop a thinned polygate electrode
IBM4 citations63
US7785999B2Aug 31, 2010
Formation of fully silicided metal gate using dual self-aligned silicide process
IBM3 citations62
US7705405B2Apr 27, 2010
Methods for the formation of fully silicided metal gates
IBM3 citations62
US7473975B2Jan 6, 2009
Fully silicided metal gate semiconductor device structure
IBM3 citations62
US7919379B2Apr 5, 2011
Dielectric spacer removal
IBM5 citations61