Inventor
LEI PINGYAN
US10 patents
Patents
10 patentsUS11555244B2Jan 17, 2023
High temperature dual chamber showerhead
APPLIED MATERIALS INC4 citations73
US9881787B2Jan 30, 2018
Deposition methods for uniform and conformal hybrid titanium oxide films
APPLIED MATERIALS INC2 citations69
US12406849B2Sep 2, 2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition
APPLIED MATERIALS INC0 citations62
US12230479B2Feb 18, 2025
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US11955319B2Apr 9, 2024
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US11658014B2May 23, 2023
Apparatuses and methods of protecting nickel and nickel containing components with thin films
APPLIED MATERIALS INC0 citations62
US11430661B2Aug 30, 2022
Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition
APPLIED MATERIALS INC0 citations62
US11421322B2Aug 23, 2022
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC0 citations62
US10508339B2Dec 17, 2019
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC1 citations62
US12016092B2Jun 18, 2024
Gas distribution ceramic heater for deposition chamber
APPLIED MATERIALS INC0 citations58