Inventor
KOPPA MANJUNATHA
IN15 patents
Patents
15 patentsUS9888528B2Feb 6, 2018
Substrate support with multiple heating zones
APPLIED MATERIALS INC11 citations83
US10892180B2Jan 12, 2021
Lift pin assembly
APPLIED MATERIALS INC16 citations82
US11555244B2Jan 17, 2023
High temperature dual chamber showerhead
APPLIED MATERIALS INC4 citations73
US9984911B2May 29, 2018
Electrostatic chuck design for high temperature RF applications
APPLIED MATERIALS INC4 citations73
US9613846B2Apr 4, 2017
Pad design for electrostatic chuck surface
APPLIED MATERIALS INC5 citations71
US10704142B2Jul 7, 2020
Quick disconnect resistance temperature detector assembly for rotating pedestal
APPLIED MATERIALS INC2 citations70
US10711348B2Jul 14, 2020
Apparatus to improve substrate temperature uniformity
APPLIED MATERIALS INC2 citations69
USD1089130SAug 19, 2025
Process chamber manifold
APPLIED MATERIALS INC1 citations62
US10373860B2Aug 6, 2019
Batch processing apparatus
APPLIED MATERIALS INC1 citations61
USD1112376SFeb 10, 2026
Process chamber mixer
APPLIED MATERIALS INC0 citations60
USD1101709SNov 11, 2025
Process chamber shower head
APPLIED MATERIALS INC0 citations59
USD1009817SJan 2, 2024
Shadow ring lift pin
APPLIED MATERIALS INC0 citations59
USD997894SSep 5, 2023
Shadow ring lift assembly
APPLIED MATERIALS INC0 citations59
USD997893SSep 5, 2023
Shadow ring lift plate
APPLIED MATERIALS INC1 citations59
US12016092B2Jun 18, 2024
Gas distribution ceramic heater for deposition chamber
APPLIED MATERIALS INC0 citations58