Inventor
PURATHE VINOD KONDA
IN4 patents
Patents
4 patentsUS10892180B2Jan 12, 2021
Lift pin assembly
APPLIED MATERIALS INC16 citations82
US11555244B2Jan 17, 2023
High temperature dual chamber showerhead
APPLIED MATERIALS INC4 citations73
US10704142B2Jul 7, 2020
Quick disconnect resistance temperature detector assembly for rotating pedestal
APPLIED MATERIALS INC2 citations70
US12016092B2Jun 18, 2024
Gas distribution ceramic heater for deposition chamber
APPLIED MATERIALS INC0 citations58