Inventor
CHA HUN
KR11 patents
⚠️ This page may combine multiple inventors who share the name “CHA HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS6039770AMar 21, 2000
Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers
SAMSUNG ELECTRONICS CO LTD47 citations92
US6251241B1Jun 26, 2001
Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield
SAMSUNG ELECTRONICS CO LTD18 citations91
US6443826B1Sep 3, 2002
Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same
SAMSUNG ELECTRONICS CO LTD15 citations83
US6037267AMar 14, 2000
Method of etching metallic film for semiconductor devices
SAMSUNG ELECTRONICS CO LTD7 citations69
US5872365AFeb 16, 1999
UV irradiation apparatus
SAMSUNG ELECTRONICS CO LTD16 citations66
US6585907B2Jul 1, 2003
Method for manufacturing a shield for an inductively-couple plasma apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
LG CHEMICAL LTD
3 patentsUS10892528B2Jan 12, 2021
Battery module, battery pack comprising battery module, and vehicle comprising battery pack
LG CHEMICAL LTD9 citations83
US11024897B2Jun 1, 2021
Battery-cooling heat sink provided with PCM capsule
LG CHEMICAL LTD0 citations61
US11217836B2Jan 4, 2022
Cooling jacket having nonuniform flow paths, for cooling battery cell surface, and battery module including same
LG CHEMICAL LTD0 citations50