Inventor
LEE KUEI-YING
TW9 patents
⚠️ This page may combine multiple inventors who share the name “LEE KUEI-YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
8 patentsUS6214698B1Apr 10, 2001
Shallow trench isolation methods employing gap filling doped silicon oxide dielectric layer
TAIWAN SEMICONDUCTOR MFG108 citations98
US6110793AAug 29, 2000
Method for making a trench isolation having a conformal liner oxide and top and bottom rounded corners for integrated circuits
TAIWAN SEMICONDUCTOR MFG69 citations93
US6350662B1Feb 26, 2002
Method to reduce defects in shallow trench isolations by post liner anneal
TAIWAN SEMICONDUCTOR MFG45 citations92
US6015757AJan 18, 2000
Method of oxide etching with high selectivity to silicon nitride by using polysilicon layer
TAIWAN SEMICONDUCTOR MFG30 citations92
US5930644AJul 27, 1999
Method of forming a shallow trench isolation using oxide slope etching
TAIWAN SEMICONDUCTOR MFG50 citations92
US5521119AMay 28, 1996
Post treatment of tungsten etching back
TAIWAN SEMICONDUCTOR MFG29 citations92
US6808985B1Oct 26, 2004
Products derived from embedded flash/EEPROM products
TAIWAN SEMICONDUCTOR MFG21 citations89
US6046062AApr 4, 2000
Method to monitor the kink effect
TAIWAN SEMICONDUCTOR MFG5 citations62