Inventor

WANG XUAN-OI

US2 patents

Patents

2 patents

US6436229B2Aug 20, 2002

Gas phase silicon etching with bromine trifluoride

CALIFORNIA INST OF TECHN54 citations93

US6162367ADec 19, 2000

Gas-phase silicon etching with bromine trifluoride

CALIFORNIA INST OF TECHN65 citations93