Inventor
TANABE SHOHEI
JP5 patents
Patents
5 patentsUS12224250B2Feb 11, 2025
Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation method
SHIBAURA MECHATRONICS CORP0 citations58
US11710707B2Jul 25, 2023
Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation method
SHIBAURA MECHATRONICS CORP0 citations58
US7913737B2Mar 29, 2011
Bonding apparatus and bonding method
SHIBAURA MECHATRONICS CORP2 citations53
US12043898B2Jul 23, 2024
Film formation apparatus and moisture removal method thereof
SHIBAURA MECHATRONICS CORP0 citations48
US11955367B2Apr 9, 2024
Film formation apparatus
SHIBAURA MECHATRONICS CORP0 citations48